关键字导读: ETCH PVD PECVD MOCVD MEMS
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EBET真人introduction
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parameter
结构形式Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
---|---|---|
密封方式Seal way | 磁流体密封Ferro-Fluidic Sealing | |
自由度数DOF | 2 | |
负载Payload | 名称name | 托盘Tray |
直径diameter | Φ370mm | |
重量weight | 2.5kg | |
zuidayundongfanwei Moving Range | R轴(mm)R-Axis | lizhuzhongxinzhirzhouzuidashenzhanchubeibanyunwutizhongxinjuli820 Distance from pillar center to the moving objects center of the biggest R-axis stretching is R820mm |
θ轴(°)θ-Axis | ||
quanxingchengzuixiaoshijian Minimum running time | R轴(s)R-Axis | 2.5 |
θ轴(s)θ-Axis | 3.5 | |
zhongfudingweijingdu Repeatability | θ轴(°)θ-Axis | ±0.01(3σ) |
R轴(mm)R-Axis | ±0.1(3σ) | |
重量Weight | 机械手本体Main-body | 41kg |
控制器Controller | 15kg | |
耐真空度Base Pressure (Pa) | 10-5Pa | |
漏率leak rate | <1*10E-8Mbar*L/s | |
碰撞保护Collision Protect Function | 盘片和机械手无损伤Disc and robot without damage |