EBET真人

SRBZ820C-SMSX

关键字导读: ETCH PVD PECVD MOCVD MEMS

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简介

EBET真人introduction

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参数

parameter


结构形式Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
密封方式Seal way磁流体密封Ferro-Fluidic Sealing
自由度数DOF2
负载Payload名称name托盘Tray
直径diameterΦ370mm
重量weight2.5kg

zuidayundongfanwei

Moving  Range
R轴(mm)R-Axis

lizhuzhongxinzhirzhouzuidashenzhanchubeibanyunwutizhongxinjuli820

Distance  from pillar center to  the moving objects  center of the biggest R-axis stretching is R820mm
θ轴(°)θ-Axis

quanxingchengzuixiaoshijian

Minimum running time
R轴(s)R-Axis2.5
θ轴(s)θ-Axis3.5

zhongfudingweijingdu

Repeatability
θ轴(°)θ-Axis±0.01(3σ)
R轴(mm)R-Axis±0.1(3σ)
重量Weight机械手本体Main-body41kg
控制器Controller15kg
耐真空度Base Pressure (Pa)10­-5Pa
漏率leak rate<1*10E-8Mbar*L/s
碰撞保护Collision Protect Function盘片和机械手无损伤Disc and robot without damage



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