EBET真人

SRBZ1440A

关键字导读: ETCH PVD PECVD MOCVD MEMS

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简介

EBET真人introduction

EBET真人dafuzaizhenkongjixieshou, ledxinpianzhizaolingyudezhenkongjixieshouchanpin,zhuyaoyongyuledxinpianzhizaoguochengzhong,shixianzhuangyoudaliangledjingyuandetuopanzaigegegongyiqiangshijiandechuansong,juyouzhenkongdugao,fuzaida,chuanshuxiaolvgao,naigaowendengtedian,dadatigaoleledxinpianshengchanzhizaodelianglvhexiaolv,shiledxinpianzhizaozhuangbeideguanjianchanpin。chuantongdeledxinpianzhizaocaiyongjichengdianluzhizaozhichengyingyongdezhenkongjixieshou,qifuzainenglizhiyou1kg。benchanpinzaijichengdianluzhizaoyongzhenkongjixieshoudejichushang,zhenduiqidafuzaixuqiu,chuangxinleqichuanshujiegouhekongzhiguilv,shiqinenggoudadao20.5kgdefuzainengli,tongshibaochihenxiaodezhanyongtiji,baochigaonaizhenkongdujijiejingdengji。


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参数

parameter


结构形式Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
驱动方式Driving method伺服电机Servo Motor
手数量Number of Arm单臂Single Arm
负载Payload名称name托盘Tray
直径diameterΦ710mm
重量weight≤10.5kg
自由度数DOF3
手臂长度Arm Length355mm

shouzhizhangdu(anzhuangzhongxinzhiguipianzhongxin)

Finger  length(distance from install center to wafer center)
765mm

yundongfanwei

Moving  Range
Z轴Z-axis

150mm

R轴,机械手旋转中心至工艺腔中心 R-axis, robot center to process chamber center极限(Ultimate)1440mm
θ轴θ-axis无限回转Infinite Rotation

quanxingchengzuixiaoshijian

Minimum running time
Z轴Z-axis1s/35mm
R轴R-axis5s/伸出或缩回Extend or Retraction
θ轴θ-axis5s/180°

zhongfudingweijingdu

Repeatability
θ轴(°)θ-Axis±0.01(3σ)
R轴(mm)R-Axis±0.1(3σ)

jixieshoudaiφ710mmfuzaihouzuixiaohuizhuanzhijing

Robot  minimum turning diameter with Φ 710 mm load
1530mm

EBET真人shenchu1440mmfuzaizhijing710mmzuiqianduanxiachuiliang

The  front sag of robot which out of 1440mm with Φ 710 mm load
5.5mm
重复定位精度Repeatability±0.2mm
耐真空度Base Pressure (Pa)10­-6Pa
重量Weight机械手本体Main-body100kg
控制器Controller15kg
碰撞保护Collision Protect Function

盘片和机械手无损伤/工位需重新校准
EBET真人              Disc  and robot without damage/need  to recalibrate position



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